UHV-LT-SPM-MBE SYSTEM
MAIN FEATURES
MAIN FEATURES
● New Pan-type scanner with q-Plus AFM Function, modular design, easy to maintain
● Optional optical access, suitable for optical experiment
● Multi-sources MBE sample preparation, In-situ deposition
● Compact Load-Lock chamber, fast sample transfer
● New Pan-type scanner with q-Plus AFM Function, modular design, easy to maintain
● Optional optical access, suitable for optical experiment
● Multi-sources MBE sample preparation, In-situ deposition
● Compact Load-Lock chamber, fast sample transfer
STM TEST DATA
STM TEST DATA
TECHNICAL DATA
TECHNICAL DATA
| Scanner | Optical compatible | |
| Modular design with optional q-Plus AFM Function | ||
| Lowest Operational temperature | ≤5K | |
| X/Y/Z Coarse movement | 2×2×8mm | |
| X/Y/Z Scan Range | 6×6×2μm @ RT | |
| 1.5×1.5×0.5μm @ LHe | ||
| LHe holding time | ≥50h（Cryostat bath capacity： 4L LHe, 15L LN2） |
|
| Temperature Drift | ＜0.2nm/h | |
| Resolution | Atomic resolution | |
| Manipulator | X/Y Axis | ±12.5mm manually actuated |
| Z Axis | 450mm stepper motorized | |
| Primary (polar) rotation | ±180° manually actuated | |
| Secondary (azimuthal) rotation | ±180° manually actuated | |
| Temperature range | 120K~RT (LN2 cooling) | |
| RT~1450K（E-Beam heating） | ||
| Evaporators (up to 6) |
DN40CF (O.D. 2.75'') | Qty：5 |
| DN63CF (O.D. 4.5'') | Qty：1 | |
| Options | Optical access, suitable for optical experiment | |
| RHEED | ||
| LEED | ||
| Ion Gun（3KeV/5KeV） | ||
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