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UHV-LT-SPM-MBE SYSTEM
超高真空LT-SPM-MBE联合系统

Product Description

  MAIN FEATURES

 

  MAIN FEATURES

 

● New Pan-type scanner with q-Plus AFM Function, modular design, easy to maintain

● Optional optical access, suitable for optical experiment

● Multi-sources MBE sample preparation, In-situ deposition

● Compact Load-Lock chamber, fast sample transfer

● New Pan-type scanner with q-Plus AFM Function, modular design, easy to maintain

● Optional optical access, suitable for optical experiment

● Multi-sources MBE sample preparation, In-situ deposition

● Compact Load-Lock chamber, fast sample transfer

  STM TEST DATA

 

  STM TEST DATA

 

  TECHNICAL DATA

 

  TECHNICAL DATA

 

 

Scanner Optical compatible
Modular design with optional q-Plus AFM Function
Lowest Operational temperature ≤5K
X/Y/Z Coarse movement 2×2×8mm
X/Y/Z Scan Range 6×6×2μm @ RT
1.5×1.5×0.5μm @ LHe
LHe holding time ≥50h(Cryostat bath capacity:
4L LHe, 15L LN2
Temperature Drift <0.2nm/h
Resolution Atomic resolution
Manipulator X/Y Axis ±12.5mm manually actuated
Z Axis 450mm stepper motorized
Primary (polar) rotation ±180° manually actuated
Secondary (azimuthal) rotation ±180° manually actuated
Temperature range 120K~RT (LN2 cooling)
RT~1450K(E-Beam heating)
Evaporators
(up to 6)
DN40CF (O.D. 2.75'') Qty:5
DN63CF (O.D. 4.5'') Qty:1
Options Optical access, suitable for optical experiment
RHEED
LEED
Ion Gun(3KeV/5KeV)

 

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UHV-LT-SPM-MBE SYSTEM