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  • ALD Systems

    • Powder ALD Systems

      • Atolyze ™ -MINI Powder ALD System

      • Atolyze ™-MEDI Powder ALD Systems

    • Wafer ALD/PEALD Systems

      • Nexalayer™ -4'' Wafer ALD/PEALD Systems

      • Nexalayer™ -6'' Wafer ALD/PEALD Systems

      • Nexalayer™ -8'' Wafer ALD/PEALD Systems

    • Desktop ALD Systems

  • SPM Systems

    • Closed-cycle Cryogen-free LT-SPM Systems

      • BlueVortex™-4K-TERS*

      • BlueVortex™-4K-NV**

      • BlueVortex™-4K-THz*

      • BlueVortex™-2K-ESR*

      • BlueVortex™-2K-TERS*

      • BlueVortex™-2K-THz*

    • Liquid Helium-based LT-SPM Systems

      • StillFrost™-5K-4L

      • StillFrost™-5K-8L

      • EcoFlow™-VT

  • MBE Systems

    • Flag Sample MBE Systems

      • Epitara™-FS MBE Systems

    • Wafer MBE Systems

      • Epitara™-4'' MBE Systems

      • Epitara™-3'' MBE Systems

      • Epitara™-2'' MBE Systems

      • Epitara™-1'' MBE Systems

  • Components&Consumables

    • Components

      • Standard Effusion Cell

      • LT Effusion Cell

      • MT Effusion Cell

      • Alkali Metal Evaporator

      • E-beam Evaporator

      • Deflection E-Beam Evaporator

      • Three-Zone Cracker

      • Cracker

      • Three-Pocket Organic Effusion Cell

      • Dual-Filament Effusion Cell

      • Dual-Pocket Effusion Cell

    • Consumables

      • Metal Crucibles

      • Al<sub>2</sub>O<sub>3</sub> Crucibles

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      • Rignt Angle Seneor

  • Electronics & Software

    • Power Supplies & Controllers

      • E-beam Controller

      • Multifunction Temperature

      • Baking Controller

      • Ion Source Controller

      • E-beam Heating Controller

    • Thin-Film Monitoring

      • Thickness Controller/ Monitor

    • Vacuum Control

      • Integrated Vacuum Control Unit

      • Titanium Sublimation Pump Controller

    • Electrical Measurement

      • Single-gain Precision Current Amplifier

      • Triple-gain Precision Current Amplifier

      • Multi-gain Precision Current Amplifier

    • Others

      • Tip Etching Unit

      • Illumination Power Unit

  • Custom Solutions

  • ALD Systems

    • Powder ALD Systems

      • Atolyze ™ -MINI Powder ALD System

      • Atolyze ™-MEDI Powder ALD Systems

    • Wafer ALD/PEALD Systems

      • Nexalayer™ -4'' Wafer ALD/PEALD Systems

      • Nexalayer™ -6'' Wafer ALD/PEALD Systems

      • Nexalayer™ -8'' Wafer ALD/PEALD Systems

    • Desktop ALD Systems

  • SPM Systems

    • Closed-cycle Cryogen-free LT-SPM Systems

      • BlueVortex™-4K-TERS*

      • BlueVortex™-4K-NV**

      • BlueVortex™-4K-THz*

      • BlueVortex™-2K-ESR*

      • BlueVortex™-2K-TERS*

      • BlueVortex™-2K-THz*

    • Liquid Helium-based LT-SPM Systems

      • StillFrost™-5K-4L

      • StillFrost™-5K-8L

      • EcoFlow™-VT

  • MBE Systems

    • Flag Sample MBE Systems

      • Epitara™-FS MBE Systems

    • Wafer MBE Systems

      • Epitara™-4'' MBE Systems

      • Epitara™-3'' MBE Systems

      • Epitara™-2'' MBE Systems

      • Epitara™-1'' MBE Systems

  • Components&Consumables

    • Components

      • Standard Effusion Cell

      • LT Effusion Cell

      • MT Effusion Cell

      • Alkali Metal Evaporator

      • E-beam Evaporator

      • Deflection E-Beam Evaporator

      • Three-Zone Cracker

      • Cracker

      • Three-Pocket Organic Effusion Cell

      • Dual-Filament Effusion Cell

      • Dual-Pocket Effusion Cell

    • Consumables

      • Metal Crucibles

      • Al<sub>2</sub>O<sub>3</sub> Crucibles

      • PBN Crucibles

      • Quartz Crucibles

      • Rignt Angle Seneor

  • Electronics & Software

    • Power Supplies & Controllers

      • E-beam Controller

      • Multifunction Temperature

      • Baking Controller

      • Ion Source Controller

      • E-beam Heating Controller

    • Thin-Film Monitoring

      • Thickness Controller/ Monitor

    • Vacuum Control

      • Integrated Vacuum Control Unit

      • Titanium Sublimation Pump Controller

    • Electrical Measurement

      • Single-gain Precision Current Amplifier

      • Triple-gain Precision Current Amplifier

      • Multi-gain Precision Current Amplifier

    • Others

      • Tip Etching Unit

      • Illumination Power Unit

  • Custom Solutions

Epitara™-FS MBE Systems


Epitara™-FS MBE Systems

< 1 >
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  • Technology & Services

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      • Closed-cycle Cryogen-free LT-SPM Systems

      • Liquid Helium-based LT-SPM Systems

    • ALD Systems

      • Powder ALD Systems

      • Wafer ALD / PEALD Systems

      • Desktop ALD Systems

    • MBE Systems

      • Flag Sample MBE Systems

      • Wafer MBE Systems

    • Components&Consumables

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      • Consumables

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      • Power Supplies & Controllers

      • Thin-Film Monitoring

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      • Electrical Measurement

      • Others

    • Custom Solutions

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  • Contact Us

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