E-beam Evaporator
MAIN FEATURES
MAIN FEATURES
●UHV Compatible
●Evaporation temperature over 3000℃
●Accurate linear motion: 0.01mm accuracy, 25mm stroke, special design
●Integrated shutter, fully open without space limitation
●Reliable flux monitor with external field shielding
●Easy and fast material reloading
● UHV Compatible
● Evaporation temperature over 3000℃
● Accurate linear motion: 0.01mm accuracy, 25mm stroke, special design
● Integrated shutter, fully open without space limitation
● Reliable flux monitor with external field shielding
● Easy and fast material reloading
MAIN APPLICATIONS
● Surface Science ● Ultra-thin films ● Multilayers
● Doping ● Sample Preparation ● Contact Metallization
MAIN APPLICATIONS
● Surface Science
● Ultra-thin films
● Multilayers
● Doping
● Sample Preparation
● Contact Metallization
Part Number Composition
② Available option 35 : DN40CF ⑥ Available options P : Pneumatic, M：Manual
Part Number Composition
② Available option 35 : DN40CF ⑥ Available options P : Pneumatic, M：Manual
TECHNICAL DATA
TECHNICAL DATA
| Mounting Flange | DN40CF (O.D. 2.75'') |
| Bakeout Temperature | 200℃ |
| In Vacuum Diameter | 34mm |
| In Vacuum Length | 210 mm standard, 190mm~400mm optional |
| Number of Pockets | 1 |
| Sample Type | rod/pellet/powder (crucible available) |
| Cooling Method | Internal water cooling, 1L/min |
| Flux Monitoring Range | 0.1nA~1mA |
| Filament Current | 0~7A (10mA step) |
| Acceleration Voltage | 0~2000V |
| Max Power | 250W |
| Beam Divergence | ±6° |
| Evaporating Temperature | ≥3000℃ |
| Crucible Size | 0.1cc, 0.15cc |
| Crucible Material | W/ Mo/Ta/ Graphite/Other material upon request |
| Rod Size | 1~4 mm Dia., 20~100mm Length |
E-beam Evaporator
MAIN FEATURES
MAIN FEATURES
●UHV Compatible
●Evaporation temperature over 3000℃
●Accurate linear motion: 0.01mm accuracy, 25mm stroke, special design
●Integrated shutter, fully open without space limitation
●Reliable flux monitor with external field shielding
●Easy and fast material reloading
● UHV Compatible
● Evaporation temperature over 3000℃
● Accurate linear motion: 0.01mm accuracy, 25mm stroke, special design
● Integrated shutter, fully open without space limitation
● Reliable flux monitor with external field shielding
● Easy and fast material reloading
MAIN APPLICATIONS
● Surface Science ● Ultra-thin films ● Multilayers
● Doping ● Sample Preparation ● Contact Metallization
MAIN APPLICATIONS
● Surface Science
● Ultra-thin films
● Multilayers
● Doping
● Sample Preparation
● Contact Metallization
Part Number Composition
② Available option 35 : DN40CF ⑥ Available options P : Pneumatic, M：Manual
Part Number Composition
② Available option 35 : DN40CF ⑥ Available options P : Pneumatic, M：Manual
TECHNICAL DATA
TECHNICAL DATA
| Mounting Flange | DN40CF (O.D. 2.75'') |
| Bakeout Temperature | 200℃ |
| In Vacuum Diameter | 34mm |
| In Vacuum Length | 210 mm standard, 190mm~400mm optional |
| Number of Pockets | 1 |
| Sample Type | rod/pellet/powder (crucible available) |
| Cooling Method | Internal water cooling, 1L/min |
| Flux Monitoring Range | 0.1nA~1mA |
| Filament Current | 0~7A (10mA step) |
| Acceleration Voltage | 0~2000V |
| Max Power | 250W |
| Beam Divergence | ±6° |
| Evaporating Temperature | ≥3000℃ |
| Crucible Size | 0.1cc, 0.15cc |
| Crucible Material | W/ Mo/Ta/ Graphite/Other material upon request |
| Rod Size | 1~4 mm Dia., 20~100mm Length |
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