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UHV-VT-SPM SYSTEM
超高真空VT-SPM系统

Product Description

  MAIN FEATURES

 

  MAIN FEATURES

 

● Compact, easy to operate

● Fast cooling down & heating up

● In-situ deposition

● Fast sample and tip reloading

● Compact, easy to operate

● Fast cooling down & heating up

● In-situ deposition

● Fast sample and tip reloading

  TECHNICAL DATA

 

  TECHNICAL DATA

 

 

Base Pressure ≤5×10-10Torr
Operating Temperature Range 8K~290K
Scan Range 4.0×4.0×0.6µm @ RT  
1.0×1.0×0.15µm @ 8K
Resolution Atomic resolution
Sensitivity XY: ≤200Å/V   Z:≤30Å/V @ RT  
XY: ≤ 50Å/V   Z:≤ 7.5Å/V @ 8K
Cryostat Type Continuous flow
Cooling Down Time ~2h
Consumption of Liquid Helium 1L/h
Temperature Drift ≤0.01K/h

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