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UHV-VT-SPM SYSTEM
超高真空VT-SPM系统
Product Description
MAIN FEATURES
MAIN FEATURES
● Compact, easy to operate
● Fast cooling down & heating up
● In-situ deposition
● Fast sample and tip reloading
● Compact, easy to operate
● Fast cooling down & heating up
● In-situ deposition
● Fast sample and tip reloading
TECHNICAL DATA
TECHNICAL DATA
| Base Pressure | ≤5×10-10Torr |
| Operating Temperature Range | 8K~290K |
| Scan Range | 4.0×4.0×0.6µm @ RT 1.0×1.0×0.15µm @ 8K |
| Resolution | Atomic resolution |
| Sensitivity | XY: ≤200Å/V Z:≤30Å/V @ RT XY: ≤ 50Å/V Z:≤ 7.5Å/V @ 8K |
| Cryostat Type | Continuous flow |
| Cooling Down Time | ~2h |
| Consumption of Liquid Helium | 1L/h |
| Temperature Drift | ≤0.01K/h |
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