Epitara™-2'' MBE Systems
MBE system for substrates up to 2 inches
Product Description
MAIN FEATURES
MAIN FEATURES
● Modular design with flexible configuration of core functional modules, enabling complex multi-step processes and precise alignment with diverse experimental objectives.
● Highly integrated design with a compact footprint, balancing performance and space efficiency, suitable for a wide range of experimental applications.
● Compatible with high-capacity electron beam evaporation sources to support diverse sample preparation requirements.
● Expandable architecture enabling seamless integration with other ultra-high vacuum (UHV) systems.
● Integrated control system with program presetting, simplifying operation while improving reliability and reproducibility.
● Modular design with flexible configuration of core functional modules, enabling complex multi-step processes and precise alignment with diverse experimental objectives
● Highly integrated design with a compact footprint, balancing performance and space efficiency, suitable for a wide range of experimental applications.
● Compatible with high-capacity electron beam evaporation sources to support diverse sample preparation requirements.
● Expandable architecture enabling seamless integration with other ultra-high vacuum (UHV) systems.
● Integrated control system with program presetting, simplifying operation while improving reliability and reproducibility.
TECHNICAL DATA
TECHNICAL DATA
| Growth Chamber | Ultimate Vacuum | Better than 7×10-11mbar | ||
| Chamber Diameter | O.D.400mm（customizable） | |||
| Cold Shield & Shutter | Optional | |||
| Source Ports | CF35×6，CF35×4（customizable） | |||
| Bakeout Temperature | max150℃ | |||
| Manipulator | Substrate Compatibility | Up to 2-inch wafer | ||
| Shutter Drive Method | Electric / pneumatic | |||
| Heating Method | Radiative heating | |||
| Temperature Range |
RT ‒ 1000 °C (Type-K thermocouple) |
|||
| Load Lock Chamber | Ultimate Vacuum | Better than 5×10-8mbar | ||
| Sample Capacity | ≥ 6 samples | |||
| Bakeout Temperature | max150℃ | |||
| Transfer Method | Manual | |||
| Control System | Basic Configuration (Optional) | Integrated Vacuum Control Unit | ||
| Manual valve operation | ||||
| Standard Configuration (Optional) | Touchscreen control panel | |||
| Data logging | ||||
| Manipulator control | ||||
| System log management | ||||
| Automated valve control | ||||
| Recipe-based growth software (optional) | ||||
| Opitons | Preparation Chamber | Ultimate Vacuum | Better than 7 × 10-10mbar | |
| Bakeout Temperature | max150℃ | |||
|
Reserved Ports |
Sample manipulator （CF100×1） Ar/H Sputtering（CF35×2） LEED（CF150×1） Viewport（CF63×1+CF35×1） |
|||
| In-situ Monitoring | RGA | |||
| QCM | ||||
| BFM | ||||
| LEED | ||||
| RHEED | ||||
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