qPlus-based SPM System Compatible with Optical Measurements

光耦合qPlus型扫描探针显微镜系统

Product Description

MAIN FEATURE

●Two cryogenic options available: traditional wet Dewar (liquid helium Dewar) and closed-cycle helium-free cooling.
●A specially designed scanner significantly enhances optical excitation and collection efficiency, while effectively suppressing laser spot jitter.
●The qPlus sensor offers ultra-low amplitude noise (~2 pm) and an outstanding quality factor of up to 100,000.
●Supports in-situ deposition within the SPM chamber.

●The preparation chamber can be equipped with a liquid helium-cooled five-axis sample stage for low-temperature deposition.

TEST DATA

TECHNICAL DATA

Temperature Range	Wet Dewar (liquid helium Dewar) Cooling	＜4K（Optical port closed）
	Closed-cycle helium-free cooling	＜5K（Optical port closed）
Coarse Range	X/Y/Z: 4×4×8 mm
Scan Range	X/Y/Z: ≥1.5×1.5×0.4 μm @ ±220 V LT
	X/Y/Z: ≥4×4×1 μm @ ±220 V RT
Resolution	XY direction:-0.1 nm; Z direction:-0.1 nm
Thermal Drift	Z: ≤100 pm/h @ LT
	XY: ≤200 pm/h @ LT
STM Performance	Z-axis Vibration: ＜2 pm
	Minimum Tunneling Current: ≤2 pA（with external preamplifier）
	Atomic resolution on HOPG and Au(111)
AFM Performance	Atomic resolution on Si(111) and NaCl(100)
	Amplitude: <10 pm
	Force sensitivity: < 350fN/Hz^1/2
Optical Module	Aspheric lens:1 or 2 lenses available
	Numerical Aperture (NA): 0.38
	Travel Range: 3×3×3 mm

DIMENSIONS

● SPM System Footprint: 2.3 × 2.1 m²

● SPM Cabinet: 1.1 × 0.65 m² (per cabinet)

● Helium Closed-Cycle Liquefaction System:

- Liquefaction Unit: 0.9 × 0.65 m²

- Compressor: 0.5 × 0.5 m²

● Split-Type Water Chiller:

- Indoor Unit: approx. 1 × 1 m²

- Outdoor Unit: approx. 1.5 × 1 m²