Deflection E-Beam Evaporator

偏转电子束蒸发源

Product Description

MAIN FEATURE

●UHV compatible

●270°electronic deflection, long filament life, easy maintenance.

●Suitable for high-purity evaporation of metals and dielectrics.

APPLICATIONS

● Surface Science ● Ultra-thin films ● Multilayers

● Doping ● Sample Preparation ● Contact Metallization

PART NUMBER COMPOSITION

② 63：DN63CF ⑤ H：＞1500℃ ⑦ Available options P: Pneumatic, M: Manual

TECHNICAL DATA

The maximum allowable installation diameter within the vacuum is 60.5 mm

Mounting Flange	DN63CF
Vacuum Length	200-400 mm
Accelerating Voltage	4-6 kV
E-Beam Power	max3 kW
Filament Current/Power	max15 A@100 W
Filament Type	Tungsten filament
Cooling Parameters	5 L/min（Maximum power）
Crucible Material	Tungsten(Other material upon request)
Crucible Capacity	2 cc
Magnet	Samarium-cobalt permanent magnet
Scanning Mode	None

INSTALLATION REQUIREMENTS

● The installation environment should be free from strong magnetic field interference.
● It is recommended to use an installation flange with a size larger than DN63CF.

● When the installation flange is DN63CF, ensure that the electron emission part is fully extended into the vacuum chamber, rather than in the flange pipeline.