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Epitara™-FS MBE Systems

Flag-type sample MBE system

Product Description

MAIN FEATURES

● Highly integrated design with a compact footprint.

● Simplified chamber architecture for intuitive operation.

● Modular platform with seamless UHV system integration.

● Highly integrated design with a compact footprint.

● Simplified chamber architecture for intuitive operation.

● Modular platform with seamless UHV system integration.

TECHNICAL DATA

Growth Chamber	Ultimate Vacuum		Better than 5×10^-10mbar
	Chamber Diameter		O.D.205mm（customizable）
	Source Ports		CF35×8 or CF63×3, CF35×5（customizable）
	Bakeout Temperature		max150℃
	Manipulator	Substrate Compatibility	Flag-style sample
		Mounting Configuration	Horizontal or vertical mounting
		Degrees of Freedom	Z travel: 50 mm, manual ; Rotation: ±180°, manual
		Heating Methods & Temperature Range	Radiative heating: RT ‒ 800 °C (Type-K thermocouple) Direct heating: RT ‒ 1200 °C (infrared measurement) Electron beam heating: RT ‒ 1100 °C (type-K thermocouple
Load Lock Chamber	Ultimate Vacuum		Better than 5×10^-8mbar
	Sample Capacity		≥ 6 samples
	Bakeout Temperature		max150℃
	Transfer Method		Manual
Control System	Basic Configuration (Optional)		Integrated Vacuum Control Unit
			Manual valve operation
	Standard Configuration (Optional)		Touchscreen control panel
			Data logging
			Manipulator control
			System log management
			Recipe-based growth software
			Automated valve control
Opitons	Manipulator		XY travel: ±12.5 mm, manual
			Motorized lift & rotation
			Sample cooling, minimum temperature 100 K
	In-situ Monitoring		RGA
			QCM
			BFM
			LEED
			RHEED

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Epitara-FS MBE System