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Dual-Pocket Effusion Cell
双源蒸发源

Product Description

MAIN FEATURE

 

●UHV compatible.

●Excellent temperature stability.

●Independent two-zone temperature control.

●Excellent thermal insulation.

●Effectively enhances the efficiency of the UHV system.

APPLICATIONS

 

● Surface Science

● Ultra-Thin Films

● Multi-Source Doping

● Sample preparation

● Research on III-V Semiconductor Thin Films for Solar Energy Applications

PART NUMBER COMPOSITION

 

② 63: DN63CF   ④ M: Medium Temperature (400‒1400℃)   ⑥ Available options P: Pneumatic, M: Manual

⑧ Available options C:Type C;K:Type K

TECHNICAL DATA

 

Mounting Flange

DN63CF (O.D. 4.5'')

Vacuum Length

270 mm standard,

260‒400 mm optional

Vacuum Diameter

63 mm

Operating Temperature

400‒1400℃

Heating Method

Tantalum filament radiation heating

Temperature Stability

 ±0.1°C

Thermocouple

Type K (400‒1100℃ )

Type C (450‒1400℃)

Outgasing Temperature

Type K :1200℃ , Type C:1450℃

Bakeout Temperature

≤200℃

Number of Pocket

2

Crucible Material

Al2O3, PBN, Quartz,

(Other Options upon Request)

Crucible Capacity

5 cc

Cooling Method

Integrated water cooling

MAIN FEATURE

 

●UHV compatible

●Excellent temperature stability

●Independent two-zone temperature control

●Excellent thermal insulation

●Effectively enhances the efficiency of the UHV system

APPLICATIONS

 

● Surface Science

● Ultra-Thin Films

● Multi-Source Doping

● Sample preparation

● Research on III-V Semiconductor Thin Films for Solar Energy Applications

PART NUMBER COMPOSITION

 

② 63: DN63CF   ④ M: Medium Temperature (400‒1400℃)   ⑥ Available options P: Pneumatic, M: Manual

⑧ Available options C:Type C;K:Type K

TECHNICAL DATA

 

Mounting Flange

DN63CF (O.D. 4.5'')

Vacuum Length

270 mm standard,

260‒400 mm optional

Vacuum Diameter

63 mm

Operating Temperature

400‒1400℃

Heating Method

Tantalum filament radiation heating

Temperature Stability

 ±0.1°C

Thermocouple

Type K (400‒1100℃ )

Type C (450‒1400℃)

Outgasing Temperature

Type K :1200℃ , Type C:1450℃

Bakeout Temperature

≤200℃

Number of Pocket

2

Crucible Material

Al2O3, PBN, Quartz,

(Other Options upon Request)

Crucible Capacity

5 cc

Cooling Method

Integrated water cooling

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