Thickness Controller/Monitor

膜厚监测仪/控制仪

Product Description

MAIN FEATURES

● 7-inch color touch screen.
● Up to 6 channels can be monitored/controlled simultaneously.
● Curve display of film thickness, growth rate, and mass (MASS).
● High stable reference, high precision.
● One-click saving of test data.
● Remote control and diagnostics, supports firmware upgrade.
● Multilayer film process control, supports co-deposition.

MAIN APPLICATIONS

● Real-time monitoring of the film and control of the growth process in the thin film deposition system.

MAIN APPLICATIONS

● Real-time monitoring of the film and control of the growth process in the thin film deposition system.

Part Number Composition

② Available options：101，200，300
③ Available channel options：C2: Dual; C4: Quad; C6: Hex

Part Number Composition

② Available options：101，200，300
③ Available channel options：C2: Dual; C4: Quad; C6: Hex

TECHNICAL DATA

Parameter	QCM101	QCM200	QCM300
Channels	Dual, Quad, Hex (optional)
Reference Frequency Stability	±1ppm
Frequency Resolution	0.02Hz
Film Thickness Resolution	0.1Å
Rate Resolution	0.01Å/sec
Rate Control	/	/	Supported
Features	Single-layer coating	Multi-layer coating, Co-deposition	Multi-layer coating, Co-deposition, Thickness control
Sensor Count	2-6
Relay Output	16
Digital Output	None	16	16
Shutter Control	16
Analog Output	None	None	2-6
Input Voltage	90~240VAC 50Hz/60Hz
Dimensions	300 x 133 x 275mm (3U, 19-inch rack)

Related Documents / DOWNLOAD

En-Thickness Controller Monitor0615

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