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MBE SYSTEM

MBE SYSTEM

分子束外延系统
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Description

  MAIN FEATURES

 

  MAIN FEATURES

 

● Compact

● Simple operation

● Cost-effective

● Compact

● Simple operation

● Cost-effective

  TECHNICAL DATA

 

  TECHNICAL DATA

 

 

CMP-MBE  8 inch sphere chamber, 304SS
Base Pressure <1×10-10 mbar
4-axis Manipulator X/Y axis: ±5mm
Z axis: 150mm
Rotation: ±180°
E-beam heating, up to 1300K
LN2 cooling to 100K
Evaporators Up to 5
Ion Gun 2~5KeV ion gun, with Port Aligner
Options QCM
Infrared temperature measurement
RHEED
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Time of issue:2021-02-08 09:48:13

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