MBE SYSTEM
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Description
MAIN FEATURES
MAIN FEATURES
● Compact
● Simple operation
● Cost-effective
● Compact
● Simple operation
● Cost-effective
TECHNICAL DATA
TECHNICAL DATA
| CMP-MBE | 8 inch sphere chamber, 304SS |
| Base Pressure | <1×10-10 mbar |
| 4-axis Manipulator | X/Y axis: ±5mm Z axis: 150mm Rotation: ±180° E-beam heating, up to 1300K LN2 cooling to 100K |
| Evaporators | Up to 5 |
| Ion Gun | 2~5KeV ion gun, with Port Aligner |
| Options | QCM Infrared temperature measurement RHEED |
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Time of issue:2021-02-08 09:48:13
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