Product Description
MAIN FEATURES
MAIN FEATURES
● Unique high-throughput continuous-gradient-component thin film growth technique
● Special-designed SPM scanner, ideal for scanning the morphology and electronic state characterization of thin film
● Special sample-holder design, liquid helium temperature to 1000℃ operation temperature
● Extensible system structure design, easy for function extension
● Unique high-throughput continuous-gradient-component thin film growth technique
● Special-designed SPM scanner, ideal for scanning the morphology and electronic state characterization of thin film
● Special sample-holder design, liquid helium temperature to 1000℃ operation temperature
● Extensible system structure design, easy for function extension
Combi-LMBE-STM TEST DATA
A detailed introduction of the system was successfully published in AIP Review of Scientific Instruments 91, 013904 (2020); doi: 10.1063/1.5119686
Article link: Https://aip.scitation.org/doi/10.1063/1.5119686
Combi-LMBE-STM TEST DATA
A detailed introduction of the system was successfully published in AIP Review of Scientific Instruments 91, 013904 (2020); doi: 10.1063/1.5119686
Article link: Https://aip.scitation.org/doi/10.1063/1.5119686
TECHNICAL DATA
TECHNICAL DATA
Vacuum | STM chamber | Vacuum ≤5×10-10 Torr |
RTTA chamber | Vacuum ≤5×10-10 Torr | |
LMBE chamber | Vacuum ≤5×10-9 Torr | |
Load Lock chamber | Vacuum ≤10-7 Torr | |
Buffer chamber | Vacuum ≤1×10-6 Torr | |
LMBE Chamber | Sample heating temperature | Stably achieve to 1000℃ |
Sample stage four-axis movement | X/Y-axis motion range: ±5.5mm | |
Z-axis motion range: ±12.5mm | ||
Close-loop rotation with 0.1° resolution | ||
Target stage three axis movement | Open-loop rotation | |
Close-loop revolution with 0.1° resolution | ||
Z-axis motion range: ±40mm | ||
1 inch (25.4mm) target with six sets | ||
Mask stage two-axis movement | Close-loop main axis rotate, rotate 0.02°, precision 0.001° optional | |
Linear motion range: ±10 mm | ||
High pressure RHEED with double differential pumping | ||
In situ observation @10-1 Torr | ||
STM Chamber | Operating temperature | Down to 6K |
Sample movement X/Y/Z | 10×10×10mm, with 1µm resolution | |
Resolution | Atomic resolution. |
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