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Combi-LMBE-SPM SYSTEM

Combi-LMBE-SPM SYSTEM

高通量SPM-LMBE联合系统
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  MAIN FEATURES

 

  MAIN FEATURES

 

● Unique high-throughput continuous-gradient-component thin film growth technique

● Special-designed SPM scanner, ideal for scanning the morphology and electronic state characterization of thin film

● Special sample-holder design, liquid helium temperature to 1000℃ operation temperature

● Extensible system structure design, easy for function extension

● Unique high-throughput continuous-gradient-component thin film growth technique

● Special-designed SPM scanner, ideal for scanning the morphology and electronic state characterization of thin film

● Special sample-holder design, liquid helium temperature to 1000℃ operation temperature

● Extensible system structure design, easy for function extension

Combi-LMBE-STM TEST DATA

 

A detailed introduction of the system was successfully published in AIP Review of Scientific Instruments 91, 013904 (2020); doi: 10.1063/1.5119686

Article link: Https://aip.scitation.org/doi/10.1063/1.5119686

Combi-LMBE-STM TEST DATA

 

A detailed introduction of the system was successfully published in AIP Review of Scientific Instruments 91, 013904 (2020); doi: 10.1063/1.5119686

Article link: Https://aip.scitation.org/doi/10.1063/1.5119686

  TECHNICAL DATA

 

  TECHNICAL DATA

 

 

Vacuum STM chamber Vacuum ≤5×10-10 Torr
RTTA chamber Vacuum ≤5×10-10 Torr
LMBE chamber Vacuum ≤5×10-9 Torr
Load Lock chamber Vacuum ≤10-7 Torr
Buffer chamber Vacuum ≤1×10-6 Torr
LMBE Chamber Sample heating temperature Stably achieve to 1000℃
  Sample stage four-axis movement X/Y-axis motion range: ±5.5mm
Z-axis motion range: ±12.5mm
Close-loop rotation with 0.1° resolution
Target stage three axis movement Open-loop rotation
Close-loop revolution with 0.1° resolution
Z-axis motion range: ±40mm
1 inch (25.4mm) target with six sets
Mask stage two-axis movement Close-loop main axis rotate, rotate 0.02°, precision 0.001° optional
Linear motion range: ±10 mm
High pressure RHEED with double differential pumping
In situ observation @10-1 Torr
STM Chamber Operating temperature Down to 6K
Sample movement X/Y/Z 10×10×10mm, with 1µm resolution
Resolution Atomic resolution.

 

We could not find any corresponding parameters, please add them to the properties table
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Combi-LMBE-SPM SYSTEM

高通量SPM-LMBE联合系统
Retail price
0.0
Market price
0.0
Number of views:
0
Product serial number
Category
Systems
Quantity
-
+
1
Description

  MAIN FEATURES

 

  MAIN FEATURES

 

● Unique high-throughput continuous-gradient-component thin film growth technique

● Special-designed SPM scanner, ideal for scanning the morphology and electronic state characterization of thin film

● Special sample-holder design, liquid helium temperature to 1000℃ operation temperature

● Extensible system structure design, easy for function extension

● Unique high-throughput continuous-gradient-component thin film growth technique

● Special-designed SPM scanner, ideal for scanning the morphology and electronic state characterization of thin film

● Special sample-holder design, liquid helium temperature to 1000℃ operation temperature

● Extensible system structure design, easy for function extension

Combi-LMBE-STM TEST DATA

 

A detailed introduction of the system was successfully published in AIP Review of Scientific Instruments 91, 013904 (2020); doi: 10.1063/1.5119686

Article link: Https://aip.scitation.org/doi/10.1063/1.5119686

Combi-LMBE-STM TEST DATA

 

A detailed introduction of the system was successfully published in AIP Review of Scientific Instruments 91, 013904 (2020); doi: 10.1063/1.5119686

Article link: Https://aip.scitation.org/doi/10.1063/1.5119686

  TECHNICAL DATA

 

  TECHNICAL DATA

 

 

Vacuum STM chamber Vacuum ≤5×10-10 Torr
RTTA chamber Vacuum ≤5×10-10 Torr
LMBE chamber Vacuum ≤5×10-9 Torr
Load Lock chamber Vacuum ≤10-7 Torr
Buffer chamber Vacuum ≤1×10-6 Torr
LMBE Chamber Sample heating temperature Stably achieve to 1000℃
  Sample stage four-axis movement X/Y-axis motion range: ±5.5mm
Z-axis motion range: ±12.5mm
Close-loop rotation with 0.1° resolution
Target stage three axis movement Open-loop rotation
Close-loop revolution with 0.1° resolution
Z-axis motion range: ±40mm
1 inch (25.4mm) target with six sets
Mask stage two-axis movement Close-loop main axis rotate, rotate 0.02°, precision 0.001° optional
Linear motion range: ±10 mm
High pressure RHEED with double differential pumping
In situ observation @10-1 Torr
STM Chamber Operating temperature Down to 6K
Sample movement X/Y/Z 10×10×10mm, with 1µm resolution
Resolution Atomic resolution.

 

We could not find any corresponding parameters, please add them to the properties table
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